English
UL3000 Fab
HVC-550-200
INFICON leak detection has a long history setting market standards in performance and ease of use. The UL3000 Fab offers the highest possible speed and optimal userfriendliness in leak test today. The UL3000 Fab was specifically developed for the specialized demands of semiconductor manufacturing, like leak checking of semiconductor and display tools, including subcomponents.
ADVANTAGES AT A GLANCE
- Save Time with I·CAL software algorithm for fast measurements in the range of 10-9 to 10-12 mbar l/s
- Most efficient leak checking using I·ZERO 2.0 with improved intelligent function for fast background suppression while maintaining high measurement sensitivity
- Applicable for vacuum and sniffer leak search
- Description
- UL3000 Fab
INFICON leak detection has a long history setting market standards in performance and ease of use. The UL3000 Fab offers the highest possible speed and optimal userfriendliness in leak test today. The UL3000 Fab was specifically developed for the specialized demands of semiconductor manufacturing, like leak checking of semiconductor and display tools, including subcomponents.