Mobile Helium Leak Detectors: Specifically designed for the needs of leak checking in semiconductor applications.
They feature flexibility, mobility, fast start up, high sensitivity, fast and precise test results, and reliability.
- Faster pump down (evacuation) times due to higher air pumping speed.
- Lower total cost of ownership (TCO) due to low maintenance roots roughing pump.
- Start leak checking earlier as HYDRO·S software eliminates the water vapor background, making it possible to quickly reach sensitive measurement ranges
- The UL3000 Fab ULTRA leak detector offers also an improved sniffer capability by using the well proven sniffer line SL3000 which has up to 10 m length. The SL3000 has a separate connection port, thus no connection to the vacuum inlet is required.