English
UL3000 Fab ULTRA
HVC-550-260
Mobile Helium Leak Detectors: Specifically designed for the needs of leak checking in semiconductor applications.
They feature flexibility, mobility, fast start up, high sensitivity, fast and precise test results, and reliability.
- Faster pump down (evacuation) times due to higher air pumping speed.
- Lower total cost of ownership (TCO) due to low maintenance roots roughing pump.
- Start leak checking earlier as HYDRO·S software eliminates the water vapor background, making it possible to quickly reach sensitive measurement ranges
- The UL3000 Fab ULTRA leak detector offers also an improved sniffer capability by using the well proven sniffer line SL3000 which has up to 10 m length. The SL3000 has a separate connection port, thus no connection to the vacuum inlet is required.
ADVANTAGES AT A GLANCE
- Save Time with I·CAL software algorithm for fast measurements in the range of 10-9 to 10-12 mbar·l/s
- Most efficient leak checking using I·ZERO 2.0 with improved intelligent function for fast background suppression while maintaining high measurement sensitivity
- Applicable for vacuum and sniffer leak search
- Minimize leak checking efforts through quick evacuation and response time
- Time saved by easy maneuverability through slim design
- Low total cost of ownership (TCO) enabled by robust ion source (3 year warranty) and counterflow vacuum system
- Easy to use, operator-guided HMI with full color high resolution rotatable display
- UL3000 Fab ULTRA: Start leak checking earlier as HYDRO·S software eliminates the water vapor background, making it possible to quickly reach sensitive measurement ranges
- UL3000 Fab ULTRA: Faster pump down (evacuation) times due to higher air pumping speed of roots pump
- UL3000 Fab ULTRA: Lower total cost of ownership (TCO) due to low maintenance roots roughing pump.
- UL3000 Fab ULTRA: The leak detector offers also an improved sniffer capability by using the well proven sniffer line SL3000 which has up to 10 m length. The SL3000 has a separate connection port, thus no connection to the vacuum inlet is required.
- Description
- UL3000 Fab ULTRA
Mobile Helium Leak Detectors: Specifically designed for the needs of leak checking in semiconductor applications.
They feature flexibility, mobility, fast start up, high sensitivity, fast and precise test results, and reliability.
- Faster pump down (evacuation) times due to higher air pumping speed.
- Lower total cost of ownership (TCO) due to low maintenance roots roughing pump.
- Start leak checking earlier as HYDRO·S software eliminates the water vapor background, making it possible to quickly reach sensitive measurement ranges
- The UL3000 Fab ULTRA leak detector offers also an improved sniffer capability by using the well proven sniffer line SL3000 which has up to 10 m length. The SL3000 has a separate connection port, thus no connection to the vacuum inlet is required.